dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Groven, Benjamin | |
dc.contributor.author | Moens, Kristof | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Van Elshocht, Sven | |
dc.date.accessioned | 2021-10-22T00:43:05Z | |
dc.date.available | 2021-10-22T00:43:05Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23468 | |
dc.source | IIOimport | |
dc.title | Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.imecauthor | Groven, Benjamin | |
dc.contributor.imecauthor | Moens, Kristof | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Groven, Benjamin::0000-0002-5781-7594 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | no | |
dc.source.conference | 1st Belux Workshop on Coating, Materials, Surfaces and Interfaces | |
dc.source.conferencedate | 11/09/2014 | |
dc.source.conferencelocation | Belvaux Luxemburg | |
imec.availability | Published - imec | |