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Alternative metals for advanced interconnects

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorWen, Liang Gong
dc.contributor.authorPeter, Antony
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorCroes, Kristof
dc.contributor.authorSwerts, Johan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T00:43:07Z
dc.date.available2021-10-22T00:43:07Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23470
dc.sourceIIOimport
dc.titleAlternative metals for advanced interconnects
dc.typeProceedings paper
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage173
dc.source.endpage176
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate20/05/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://www.ieeeexplore.us/xpl/articleDetails.jsp?arnumber=6831863&punumber%3D6826038%26sortType%3Dasc_p_Sequence%26filter%3DAND%
imec.availabilityPublished - imec


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