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Alternative metals for advanced interconnects

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorWen, Liang Gong
dc.contributor.authorPeter, Antony
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorDutta, Shibesh
dc.contributor.authorCroes, Kristof
dc.contributor.authorSwerts, Johan
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T00:43:08Z
dc.date.available2021-10-22T00:43:08Z
dc.date.issued2014-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23471
dc.sourceIIOimport
dc.titleAlternative metals for advanced interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecPeter, Antony::0000-0001-5941-0563
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecBoemmels, Juergen::0000-0002-8761-5213
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceInternational Conference Micro- and Nanoelectronics - ICMNE
dc.source.conferencedate6/10/2014
dc.source.conferencelocationMoscow Russia
dc.identifier.urlhttp://www.icmne.ftian.ru/
imec.availabilityPublished - imec


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