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Measurement of residual stress in thin films by using the optical microprobe

dc.contributor.authorAtkinson, A.
dc.contributor.authorClarke, D. R.
dc.contributor.authorJain, Suresh
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorWebb, S.
dc.date.accessioned2021-09-30T11:25:07Z
dc.date.available2021-09-30T11:25:07Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2347
dc.sourceIIOimport
dc.titleMeasurement of residual stress in thin films by using the optical microprobe
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage513
dc.source.endpage518
dc.source.conferenceThin Films: Stresses and Mechanical Propeties VII
dc.source.conferencedate1/12/1997
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 505


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