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Sub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics

dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-22T00:43:53Z
dc.date.available2021-10-22T00:43:53Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23499
dc.sourceIIOimport
dc.titleSub-nanometer pore sealing solution of ultra- porous oxycarbosilane-based spin-on dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.conference1st BeLux Workshop on "Coating, Materials, Surfaces and Interfaces"
dc.source.conferencedate10/09/2014
dc.source.conferencelocationLuxembourg Luxembourg
imec.availabilityPublished - imec


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