Show simple item record

Self-organized organic/inorganic films functional to next generation metallization schemes

dc.contributor.authorArmini, Silvia
dc.contributor.authorCarnevali, Guido
dc.contributor.authorSun, Yiting
dc.contributor.authorZhang, Liping
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorZhang, Yu
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDelande, Tinne
dc.contributor.authorWen, Liang Gong
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T00:43:56Z
dc.date.available2021-10-22T00:43:56Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23500
dc.sourceIIOimport
dc.titleSelf-organized organic/inorganic films functional to next generation metallization schemes
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageC4-IT-0541
dc.source.conferenceIUMRS-ICEM - International Conference on Electronic Materials
dc.source.conferencedate8/06/2014
dc.source.conferencelocationTaipeh Taiwan
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
29282.pdf
Size:
95.28Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record