Thickness effect on the structural and electrical properties of poly-SiGe films

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Authors

Asafa, Tesleem; Witvrouw, Ann; Schneider, D.; Moussa, Alain; Tabet, N.; Said, S.A.M.

ISSN

0025-5408

Journal

Materials Research Bulletin

Volume

49

Title

Thickness effect on the structural and electrical properties of poly-SiGe films

Publication type

Journal article

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