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Thickness effect on the structural and electrical properties of poly-SiGe films

dc.contributor.authorAsafa, Tesleem
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSchneider, D.
dc.contributor.authorMoussa, Alain
dc.contributor.authorTabet, N.
dc.contributor.authorSaid, S.A.M.
dc.date.accessioned2021-10-22T00:44:10Z
dc.date.available2021-10-22T00:44:10Z
dc.date.issued2014
dc.identifier.issn0025-5408
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23505
dc.sourceIIOimport
dc.titleThickness effect on the structural and electrical properties of poly-SiGe films
dc.typeJournal article
dc.contributor.imecauthorMoussa, Alain
dc.source.peerreviewyes
dc.source.beginpage102
dc.source.endpage107
dc.source.journalMaterials Research Bulletin
dc.source.volume49
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0025540813007204
imec.availabilityPublished - imec


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