Authors

Atalay, Ahmed; Van Gompel, Mathias; D'Haen, Jan; Turner, Stuart; Van Tendeloo, G.; Haenen, Ken; Wagner, Patrick

Conference

13th International Conference on Reactive Sputter Deposition

Title

Effect of deposition parameters on A1:ZnO transparant conductive oxide thin films prepared by DC sputtering

Publication type

Oral presentation