Materials for advanced interconnects
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-22T00:44:35Z | |
| dc.date.available | 2021-10-22T00:44:35Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23514 | |
| dc.source | IIOimport | |
| dc.title | Materials for advanced interconnects | |
| dc.type | Proceedings paper | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 1 | |
| dc.source.endpage | 1 | |
| dc.source.conference | Moscow Workshop on Topical Issues of Nanoelectronics Technology | |
| dc.source.conferencedate | 4/02/2014 | |
| dc.source.conferencelocation | Moscow Russia | |
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||