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Characterization of coatings with huge internal surfaces by using ellipsometry

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T00:44:38Z
dc.date.available2021-10-22T00:44:38Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23515
dc.sourceIIOimport
dc.titleCharacterization of coatings with huge internal surfaces by using ellipsometry
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conferenceEuropean SENTECH Seminar "Ellipsometry and Reflectometry for Characterizing Thin Films"
dc.source.conferencedate24/06/2014
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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