Publication:
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
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1894 since deposited on 2021-10-22
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Acq. date: 2026-08-06
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Statistics
Views
1894 since deposited on 2021-10-22
2last month
2last week
Acq. date: 2026-08-06
Citations