Publication:
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
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1886 since deposited on 2021-10-22
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Acq. date: 2025-10-24
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Metrics
Views
1886 since deposited on 2021-10-22
411item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations