dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-22T00:46:31Z | |
dc.date.available | 2021-10-22T00:46:31Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23546 | |
dc.source | IIOimport | |
dc.title | 3D system integration technology | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | no | |
dc.source.conference | International Electron Devices Meeting - IEDM, Short course | |
dc.source.conferencedate | 14/12/2014 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |