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Poly silicon germanium alloys, a suitable material for surface micromachined devices

dc.contributor.authorBaert, Kris
dc.contributor.authorCaymax, Matty
dc.contributor.authorFiorini, Paolo
dc.contributor.authorSedky, Sherif
dc.date.accessioned2021-09-30T11:25:22Z
dc.date.available2021-09-30T11:25:22Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2354
dc.sourceIIOimport
dc.titlePoly silicon germanium alloys, a suitable material for surface micromachined devices
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage709
dc.source.endpage711
dc.source.conferenceMicro System Technologies 98 - 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components
dc.source.conferencedate1/12/1998
dc.source.conferencelocationPotsdam Germany
imec.availabilityPublished - open access


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