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A micromachined pyroelectric infrared detector for application in a CO2 controlled ventilation system

dc.contributor.authorBaert, Kris
dc.contributor.authorDe Vries, Atze
dc.date.accessioned2021-09-30T11:25:25Z
dc.date.available2021-09-30T11:25:25Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2355
dc.sourceIIOimport
dc.titleA micromachined pyroelectric infrared detector for application in a CO2 controlled ventilation system
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage636
dc.source.endpage638
dc.source.conferenceMicro System Technologies 98 - 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components
dc.source.conferencedate1/12/1998
dc.source.conferencelocationPotsdam Germany
imec.availabilityPublished - open access


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