Authors

Baert, Kris; Maes, David; Haspeslagh, Luc; Laureyn, Wim; Sedky, Sherif; van der Groen, Sonja; Van Gerwen, Peter; Van Steenkiste, Filip

Conference

Micro System Technologies 98 - 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components

Title

CMOS-based transducers

Publication type

Proceedings paper

Embargo date

9999-12-31