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Nanoparticle removal with megasonics: A review

dc.contributor.authorBrems, Steven
dc.contributor.authorHauptmann, Marc
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorPacco, Antoine
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorXu, XiuMei
dc.contributor.authorWostyn, Kurt
dc.contributor.authorMertens, Paul
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T00:49:21Z
dc.date.available2021-10-22T00:49:21Z
dc.date.issued2014
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23581
dc.sourceIIOimport
dc.titleNanoparticle removal with megasonics: A review
dc.typeJournal article
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageN3010
dc.source.endpageN3014
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume3
dc.identifier.urlhttp://jss.ecsdl.org/content/3/1/N3010.full
imec.availabilityPublished - open access


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