Publication:

Nanoparticle removal with megasonics: A review

Date

2014
Journal article
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Author(s)

Brems, Steven  
;
Hauptmann, Marc
;
Camerotto, Elisabeth  
;
Pacco, Antoine  
;
Kim, Tae-Gon
;
Xu, XiuMei  
;
Wostyn, Kurt  
;
Mertens, Paul  
;
De Gendt, Stefan  

Journal

ECS Journal of Solid State Science and Technology

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