Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Nanoparticle removal with megasonics: A review
Publication:
Nanoparticle removal with megasonics: A review
Copy permalink
Date
2014
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
28280.pdf
793.93 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brems, Steven
;
Hauptmann, Marc
;
Camerotto, Elisabeth
;
Pacco, Antoine
;
Kim, Tae-Gon
;
Xu, XiuMei
;
Wostyn, Kurt
;
Mertens, Paul
;
De Gendt, Stefan
Journal
ECS Journal of Solid State Science and Technology
Abstract
Description
Metrics
Views
1994
since deposited on 2021-10-22
2
last month
1
last week
Acq. date: 2026-01-06
Citations
Metrics
Views
1994
since deposited on 2021-10-22
2
last month
1
last week
Acq. date: 2026-01-06
Citations