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Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorJanssen, N. M. A.
dc.contributor.authorZeng, Zeng
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorKarabacak, D. M.
dc.contributor.authorVandecasteele, Marianne
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-22T00:49:46Z
dc.date.available2021-10-22T00:49:46Z
dc.date.issued2014
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23585
dc.sourceIIOimport
dc.titlePiezoelectric transduction of flexural modes in pre-stressed microbeam resonators
dc.typeJournal article
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage85014
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue8
dc.source.volume24
dc.identifier.urlhttp://iopscience.iop.org/0960-1317/24/8/085014/
imec.availabilityPublished - imec


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