Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

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Authors

Brondani Torri, Guilherme; Janssen, N. M. A.; Zeng, Zeng; Rottenberg, Xavier; Karabacak, D. M.; Vandecasteele, Marianne; Van Hoof, Chris; Puers, Bob; Tilmans, Harrie

ISSN

0960-1317

Issue

8

Journal

Journal of Micromechanics and Microengineering

Volume

24

Title

Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

Publication type

Journal article

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