Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

dc.contributor.author	Brondani Torri, Guilherme
dc.contributor.author	Janssen, N. M. A.
dc.contributor.author	Zeng, Zeng
dc.contributor.author	Rottenberg, Xavier
dc.contributor.author	Karabacak, D. M.
dc.contributor.author	Vandecasteele, Marianne
dc.contributor.author	Van Hoof, Chris
dc.contributor.author	Puers, Bob
dc.contributor.author	Tilmans, Harrie
dc.contributor.imecauthor	Brondani Torri, Guilherme
dc.contributor.imecauthor	Rottenberg, Xavier
dc.contributor.imecauthor	Van Hoof, Chris
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Tilmans, Harrie
dc.contributor.orcidimec	Brondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimec	Tilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned	2021-10-22T00:49:46Z
dc.date.available	2021-10-22T00:49:46Z
dc.date.issued	2014
dc.identifier.issn	0960-1317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23585
dc.identifier.url	http://iopscience.iop.org/0960-1317/24/8/085014/
dc.source.beginpage	85014
dc.source.issue	8
dc.source.journal	Journal of Micromechanics and Microengineering
dc.source.volume	24
dc.title	Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators
dc.type	Journal article
dspace.entity.type	Publication
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