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Investigation of correlated trap sites in SILC, BTI and RTN in SiON and HKMG devices
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Authors
Bury, Erik
;
Degraeve, Robin
;
Cho, Moon Ju
;
Kaczer, Ben
;
Goes, Wolfang
;
Grasser, Tibor
;
Groeseneken, Guido
Conference
21st International Symposium on the Physical and Failure Analysis of Integrated Circuits - IPFA
Title
Investigation of correlated trap sites in SILC, BTI and RTN in SiON and HKMG devices
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Meeting abstract
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