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Monolithic integration of Ge and III-V compound semiconductors on 300mm Si for CMOS

dc.contributor.authorCaymax, Matty
dc.contributor.authorLoo, Roger
dc.contributor.authorMerckling, Clement
dc.contributor.authorGuo, Weiming
dc.contributor.authorJiang, Sijia
dc.contributor.authorHeyns, Marc
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T00:53:05Z
dc.date.available2021-10-22T00:53:05Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23614
dc.sourceIIOimport
dc.titleMonolithic integration of Ge and III-V compound semiconductors on 300mm Si for CMOS
dc.typeMeeting abstract
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium: Materials Research for Group IV Semiconductors
dc.source.conferencedate26/05/2014
dc.source.conferencelocationLille France
dc.identifier.urlhttp://www.emrs-strasbourg.com/index.php?option=com_content&task=view&id=716&Itemid=999
imec.availabilityPublished - imec


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