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Scanning probe tomography for advanced material characterization

dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T00:53:58Z
dc.date.available2021-10-22T00:53:58Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23621
dc.sourceIIOimport
dc.titleScanning probe tomography for advanced material characterization
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewyes
dc.source.conferenceIEEE International Integrated Reliability Workshop - IIRW
dc.source.conferencedate12/10/2014
dc.source.conferencelocationFallen Leaf Lake, CA USA
imec.availabilityPublished - imec


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