Plasma etching of organic low-dielectric-constant polymers: comparative analysis

Thumbnail
View/open
Metadata
Show full item record
Authors
Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Alaerts, Carine; Maex, Karen
Conference
Low Dielectric Constant Materials and Applications in Microelectronics IV
Title
Plasma etching of organic low-dielectric-constant polymers: comparative analysis
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections