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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation

dc.contributor.authorChoudhury, Faraz
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorNishi, Y.
dc.contributor.authorShohet, J.L
dc.date.accessioned2021-10-22T00:58:22Z
dc.date.available2021-10-22T00:58:22Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23653
dc.sourceIIOimport
dc.titleInfluence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpagePS-TuP12
dc.source.conferenceAVS 61st InternationalSymposium and Exhibition
dc.source.conferencedate9/11/2014
dc.source.conferencelocationBaltimore, MD USA
imec.availabilityPublished - open access


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