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Integrated nanocrystalline diamond heater and temperature sensing platform

dc.contributor.authorClukers, Tim
dc.contributor.authorDrijkoningen, Jeroen
dc.contributor.authorWagner, Patrick
dc.contributor.authorDaenen, Michael
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-22T00:59:56Z
dc.date.available2021-10-22T00:59:56Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23664
dc.sourceIIOimport
dc.titleIntegrated nanocrystalline diamond heater and temperature sensing platform
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting
dc.source.conferencedate30/11/2014
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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