III-V and germanium FinFET devices integrated on a 300mm Si platform

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Authors
Collaert, Nadine; Waldron, Niamh; Merckling, Clement; Witters, Liesbeth; Loo, Roger; Mitard, Jerome; Pourghaderi, Mohammad Ali; Eneman, Geert; Barla, Kathy; Thean, Aaron
Conference
10th International Nanotechnology Conference on Communications and Cooperation - INC10
Title
III-V and germanium FinFET devices integrated on a 300mm Si platform
Publication type
Oral presentation
Embargo date
9999-12-31
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