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Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques

dc.contributor.authorConard, Thierry
dc.date.accessioned2021-10-22T01:01:43Z
dc.date.available2021-10-22T01:01:43Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23676
dc.sourceIIOimport
dc.titleNano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium H: Analytical Techniques for Precise Characterization of Nanomaterials - ALTECH
dc.source.conferencedate26/05/2014
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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