Polymer coated MEMS resonator for room temperature NH3 sensing

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Authors
Dam, Van Anh; Wouters, Daan; Knoben, Wout; Brongersma, Sywert; van Schaijk, Rob
Conference
IEEE Sensors Conference - SENSORS
Title
Polymer coated MEMS resonator for room temperature NH3 sensing
Publication type
Proceedings paper
Embargo date
9999-12-31
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