dc.contributor.author | Dellaert, Dries | |
dc.contributor.author | Doutreloigne, Jan | |
dc.date.accessioned | 2021-10-22T01:13:04Z | |
dc.date.available | 2021-10-22T01:13:04Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23744 | |
dc.source | IIOimport | |
dc.title | Modeling and simulation of a MEMS thermal actuator with polysilicon heater | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Doutreloigne, Jan | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 6 | |
dc.source.conference | 15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE | |
dc.source.conferencedate | 7/04/2014 | |
dc.source.conferencelocation | Gent Belgium | |
dc.identifier.url | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6813800&tag=1 | |
imec.availability | Published - open access | |