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Modeling and simulation of a MEMS thermal actuator with polysilicon heater

dc.contributor.authorDellaert, Dries
dc.contributor.authorDoutreloigne, Jan
dc.date.accessioned2021-10-22T01:13:04Z
dc.date.available2021-10-22T01:13:04Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23744
dc.sourceIIOimport
dc.titleModeling and simulation of a MEMS thermal actuator with polysilicon heater
dc.typeProceedings paper
dc.contributor.imecauthorDoutreloigne, Jan
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage6
dc.source.conference15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate7/04/2014
dc.source.conferencelocationGent Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6813800&tag=1
imec.availabilityPublished - open access


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