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Design and characterization of a MEMS thermal actuator and a locking switch for telecommunication applications

dc.contributor.authorDellaert, Dries
dc.contributor.authorDoutreloigne, Jan
dc.date.accessioned2021-10-22T01:13:13Z
dc.date.available2021-10-22T01:13:13Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23745
dc.sourceIIOimport
dc.titleDesign and characterization of a MEMS thermal actuator and a locking switch for telecommunication applications
dc.typeProceedings paper
dc.contributor.imecauthorDoutreloigne, Jan
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage25
dc.source.endpage28
dc.source.conferenceNSTI - Nanotech Conference
dc.source.conferencedate15/06/2014
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - open access


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