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Deposition of a silicon oxide film showing enhanced surface passivation through negative fixed charges
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Authors
Descamps, Pierre
;
Kaiser, Vincent
;
Beaucarne, Guy
;
Kuzma Filipek, Izabela
;
Delamare,
Conference
4th International Conference on Silicon Photovoltaics - Silicon PV
Title
Deposition of a silicon oxide film showing enhanced surface passivation through negative fixed charges
Publication type
Oral presentation
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