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Effect of substrate defects on GOI of ultra-thin gate oxides
Publication:
Effect of substrate defects on GOI of ultra-thin gate oxides
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Date
1998
Proceedings Paper
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2761.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bearda, Twan
;
Vanhellemont, Jan
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
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1892
since deposited on 2021-09-30
Acq. date: 2025-12-18
Citations
Metrics
Views
1892
since deposited on 2021-09-30
Acq. date: 2025-12-18
Citations