Effect of substrate defects on GOI of ultra-thin gate oxides

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Authors
Bearda, Twan; Vanhellemont, Jan; Mertens, Paul; Heyns, Marc
Conference
Proceedings of the 5th International Symposium on High Purity Silicon V
Title
Effect of substrate defects on GOI of ultra-thin gate oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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