Ti as a reactive gate electrode on high-k/p-Ge MOS capacitors

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Authors
Fadida, Sivan; Nyns, Laura; Lin, Dennis; Van Elshocht, Sven; Caymax, Matty; Eizenberg, Moshe
Conference
18th Workshop on Dielectrics in Microelectronics - WODIM
Title
Ti as a reactive gate electrode on high-k/p-Ge MOS capacitors
Publication type
Meeting abstract
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