Show simple item record

A fast triple patterning solution with fix guidance

dc.contributor.authorFang, Weiping
dc.contributor.authorArikati, Srini
dc.contributor.authorCelingir, Erdem
dc.contributor.authorHug, Marco A.
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorMailfert, Julien
dc.contributor.authorLucas, Kevin
dc.contributor.authorGao, Weimin
dc.date.accessioned2021-10-22T01:25:22Z
dc.date.available2021-10-22T01:25:22Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23803
dc.sourceIIOimport
dc.titleA fast triple patterning solution with fix guidance
dc.typeProceedings paper
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorMailfert, Julien
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage90530A
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability VIII
dc.source.conferencedate23/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1855794
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9053


Files in this item

Thumbnail
Name:
27774.pdf
Size:
2.060Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record