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Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films

dc.contributor.authorFilatova, E.O.
dc.contributor.authorKozhevnikov, I.V.
dc.contributor.authorSokolov, A.A.
dc.contributor.authorKonashuk, A.S.
dc.contributor.authorSchaefers, F.
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorAfanasiev, Valeri
dc.date.accessioned2021-10-22T01:27:32Z
dc.date.available2021-10-22T01:27:32Z
dc.date.issued2014
dc.identifier.issn0368-2048
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23813
dc.sourceIIOimport
dc.titleApplication of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorAfanasiev, Valeri
dc.source.peerreviewyes
dc.source.beginpage110
dc.source.endpage116
dc.source.journalJournal of Electron Spectroscopy and Related Phenomena
dc.source.volume196
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0368204814000395
imec.availabilityPublished - imec


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