Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films
Metadata
Show full item record
Authors
Filatova, E.O.
;
Kozhevnikov, I.V.
;
Sokolov, A.A.
;
Konashuk, A.S.
;
Schaefers, F.
;
Popovici, Mihaela Ioana
;
Afanasiev, Valeri
ISSN
0368-2048
Journal
Journal of Electron Spectroscopy and Related Phenomena
Volume
196
Title
Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films
Publication type
Journal article
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login