Publication:
Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films
Date
| dc.contributor.author | Filatova, E.O. | |
| dc.contributor.author | Kozhevnikov, I.V. | |
| dc.contributor.author | Sokolov, A.A. | |
| dc.contributor.author | Konashuk, A.S. | |
| dc.contributor.author | Schaefers, F. | |
| dc.contributor.author | Popovici, Mihaela Ioana | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.date.accessioned | 2021-10-22T01:27:32Z | |
| dc.date.available | 2021-10-22T01:27:32Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 0368-2048 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23813 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0368204814000395 | |
| dc.source.beginpage | 110 | |
| dc.source.endpage | 116 | |
| dc.source.journal | Journal of Electron Spectroscopy and Related Phenomena | |
| dc.source.volume | 196 | |
| dc.title | Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |