NEXAFS characterization of inorganic and organic materials for semiconductor application

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Authors
Fleischmann, Claudia; Hoenicke, Philipp; Hermann, Peter; Mueller, Matthias; Beckhoff, Burkhard; Voroshazi, Eszter; Conard, Thierry; Vandervorst, Wilfried
Conference
European Conference on X-Ray Spectrometry - EXRS
Title
NEXAFS characterization of inorganic and organic materials for semiconductor application
Publication type
Meeting abstract
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