Publication:

NEXAFS characterization of inorganic and organic materials for semiconductor application

Date

2014
Meeting abstract
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Author(s)

Fleischmann, Claudia  
;
Hoenicke, Philipp
;
Hermann, Peter
;
Mueller, Matthias
;
Beckhoff, Burkhard
;
Voroshazi, Eszter  
;
Conard, Thierry  
;
Vandervorst, Wilfried  

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