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Thermally induced pit formation and Sn diffusion in strained GeSn films

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorLieten, Ruben
dc.contributor.authorHoenicke, Philipp
dc.contributor.authorSeidel, Felix
dc.contributor.authorZaima, Shimura
dc.contributor.authorConard, Thierry
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-22T01:30:01Z
dc.date.available2021-10-22T01:30:01Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23824
dc.sourceIIOimport
dc.titleThermally induced pit formation and Sn diffusion in strained GeSn films
dc.typeOral presentation
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorSeidel, Felix
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting SymposiumX: Materials Research for Group IV Semiconductors: Growth, Characterization and Technological Dev.
dc.source.conferencedate26/05/2014
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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