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0.5µm and 0.35µm BiCMOS - silicon etch developement at IMEC

dc.contributor.authorBeckx, Stephan
dc.date.accessioned2021-09-30T11:27:04Z
dc.date.available2021-09-30T11:27:04Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2382
dc.sourceIIOimport
dc.title0.5µm and 0.35µm BiCMOS - silicon etch developement at IMEC
dc.typeOral presentation
dc.contributor.imecauthorBeckx, Stephan
dc.source.peerreviewno
dc.source.conferenceLAM Symposium; 1 April 1998; Geneva, Switzerland.
dc.source.conferencelocation
imec.availabilityPublished - imec


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