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Détermination de la composition de films minces au-dela de la résolution latérale du SIMS

dc.contributor.authorFranquet, Alexis
dc.date.accessioned2021-10-22T01:32:22Z
dc.date.available2021-10-22T01:32:22Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23833
dc.sourceIIOimport
dc.titleDétermination de la composition de films minces au-dela de la résolution latérale du SIMS
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewno
dc.source.conferenceReunion des Utilisateurs Francophones TOF-SIMS - IONTOF
dc.source.conferencedate9/04/2014
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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