dc.contributor.author | Gaudestad, Jan | |
dc.contributor.author | Irizco, A. | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Wang, Teng | |
dc.contributor.author | Webers, Tomas | |
dc.contributor.author | Kelley, R. | |
dc.contributor.author | Morrison, T. | |
dc.contributor.author | Madala, S. | |
dc.date.accessioned | 2021-10-22T01:33:48Z | |
dc.date.available | 2021-10-22T01:33:48Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23839 | |
dc.source | IIOimport | |
dc.title | Failure analysis work flow for electrical shorts in triple stacked 3D TSV daisy chains | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Webers, Tomas | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 38 | |
dc.source.endpage | 42 | |
dc.source.conference | 40th International Symposium for Testing and Failure Analysis - ISTFA | |
dc.source.conferencedate | 9/11/2014 | |
dc.source.conferencelocation | Houston, TX USA | |
imec.availability | Published - imec | |