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Design aspects for CPI robust BEOL

dc.contributor.authorGonzalez, Mario
dc.contributor.authorKljucar, Luka
dc.contributor.authorVandevelde, Bart
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T01:40:33Z
dc.date.available2021-10-22T01:40:33Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23866
dc.sourceIIOimport
dc.titleDesign aspects for CPI robust BEOL
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage5
dc.source.conference15th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
dc.source.conferencedate7/04/2014
dc.source.conferencelocationGent Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813824&contentType=Conference+Publications
imec.availabilityPublished - imec


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