Process optimization of templated DSA flows

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Authors
Gronheid, Roel; Bekaert, Joost; MKuppuswamy, Vijaya Kumar; Vandenbroeck, Nadia; Doise, Jan; Cao, Yi; Lin, Guanyang; Sayan, Safak; Parnell, Doni; Somervell, Mark
Conference
Advances in Patterning Materials and Processes XXXI
Title
Process optimization of templated DSA flows
Publication type
Proceedings paper
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