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Energy distribution of positive charges in high-k dielectric

dc.contributor.authorHatta, S. W. M.
dc.contributor.authorJi, Z.
dc.contributor.authorZhang, J. F.
dc.contributor.authorZhang, W.D.
dc.contributor.authorSoin, N.
dc.contributor.authorKaczer, Ben
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-22T01:51:40Z
dc.date.available2021-10-22T01:51:40Z
dc.date.issued2014
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23908
dc.sourceIIOimport
dc.titleEnergy distribution of positive charges in high-k dielectric
dc.typeJournal article
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage2329
dc.source.endpage2333
dc.source.journalMicroelectronics Reliability
dc.source.issue9_10
dc.source.volume54
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271414002261
imec.availabilityPublished - imec


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