Energy distribution of positive charges in high-k dielectric

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Authors

Hatta, S. W. M.; Ji, Z.; Zhang, J. F.; Zhang, W.D.; Soin, N.; Kaczer, Ben; De Gendt, Stefan; Groeseneken, Guido

ISSN

0026-2714

Issue

9_10

Journal

Microelectronics Reliability

Volume

54

Title

Energy distribution of positive charges in high-k dielectric

Publication type

Journal article

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