Publication:
Energy distribution of positive charges in high-k dielectric
Date
| dc.contributor.author | Hatta, S. W. M. | |
| dc.contributor.author | Ji, Z. | |
| dc.contributor.author | Zhang, J. F. | |
| dc.contributor.author | Zhang, W.D. | |
| dc.contributor.author | Soin, N. | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-22T01:51:40Z | |
| dc.date.available | 2021-10-22T01:51:40Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 0026-2714 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23908 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0026271414002261 | |
| dc.source.beginpage | 2329 | |
| dc.source.endpage | 2333 | |
| dc.source.issue | 9_10 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 54 | |
| dc.title | Energy distribution of positive charges in high-k dielectric | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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